Type

Products

Cluster

Thermal CVD Cluster System Equipped with Glove Box for the Synthesis of 2D 

Materials like Graphene(2D Cluster Lab 50)
CVD Cluster System (2D Cluster Lab S1-25)
CVD Cluster System (2D Cluster Lab S1-50)
CVD Cluster System (2D Cluster Lab S1-75)
CVD Cluster System (2D Cluster Lab S1-100)
CVD Cluster System (2D Cluster Lab D1-25)
CVD Cluster System (2D Cluster Lab D1-50)
CVD Cluster System (2D Cluster Lab D1-75)
CVD Cluster System (2D Cluster Lab D1-100)

Batch

Thermal CVD System for Uniform SiC coating(CVD Lab1200)

Thermal CVD System with Uniform Heating Zone(CVD Lab-50N)
(ref1), (ref2), (ref3), (ref4), (ref5), (ref6), (ref7), (ref8), (ref9), (ref10), (ref11), (ref12), (ref13), (ref14), (ref15), (ref16), (ref17), (ref18), (ref19), (ref20), (ref21)

CNT-YARN(CNT YARN-100)-(Ref1)

Thermal CVD system for nanowire synthesis(PECVD Nano Lab-100)-(Ref1)

Thermal CVD Equipped with Borazine Source(CVD Lab-S3)
(ref1), (ref2), (ref3), (ref4), (ref5), (ref6)

Thermal CVD system for graphene synthesis(F-1307F)

Thermal CVD for Graphene Synthesis(CVD Lab-S1)

Thermal CVD with RF Plasma Source for Graphene Synthesis(CVD Lab-S2)

Atomic Layer Deposition System(ALD-150S1)

Thermal CVD for Graphene Foam Synthesis(CVD Lab-F1)

Thermal CVD for MoS2 Synthesis(CVD Lab-M1)

Thermal CVD System for CNT Forest(CVD Lab-50F)

Thermal CVD for WSe2 Synthesis(CVD Lab-W1)

RTCVD (Rapid Thermal CVD) System for Graphene Synthesis(CVD Lab-R1)

Cluster System equipped with ICP-CVD, CCP CVD & RIE, E-Beam Evaporator, Sputter Modules(Cluster Lab 150-S1)

Thermal Vertical CVD System for Growth of Carbon NanoTube(CVD Lab-V1)

ATS-NB CVD-Raman Series Compact Thermal CVD & ex-situ Raman(Compact CVD-Raman Combo 1)