PECVD

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  PECVD
       
위・아래 삭제 복제 복제전송 텍스트기본스타일
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Type

Products

Cluster

Cluster System for PECVD Silicon Layer(Cluster CVD-300)

PECVD-PVD Cluster System for Graphene Synthesis (Graphene Cluster Lab 200)

Batch

ICP CVD System for Graphene and Boron Carbide Layers(PECVD Lab 200-(Ref1)

PECVD System for Diamondlike Carbon(DLC PECVD Lab-100D)

PECVD System for OLED Barrier Layers(EL-PECVD Lab-100)

PECVD System with High Density Plasma(PECVD Lab-100O)

PECVD System for Low Temp. CNTs Synthesis(PECVD Lab-100-N)
(ref1), (ref2), (ref3) (ref4), (ref5)

PECVD System for Solar Cell AR Coatings(PECVD Lab-300)

Large scale of plasma surface Modification and PECVD system (PECVD-B2600)

Thermal CVD system for nanowire synthesis(PECVD Nano Lab-100)-(Ref1)

PEALD System for R&D applications(PEALD-150S1)

PECVD System including LPCVD Function for Large Area Deposition(CVD-1000S)